Electrical Engineering > LECTURE SLIDES/NOTES > University of Pennsylvania - ESE 529ESE529_Spring2020_lecture05_dynamics (All)
University of Pennsylvania - ESE 529ESE529_Spring2020_lecture05_dynamics
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ESE 529 Introduction to MEMS and NEMS Lecture 5 Troy Olsson Assistant Professor Department of Electrical and Systems Engineering [email protected] Lecture Overview • Last Time • We ... learned about pressure loads • We learned about the deflection of MEMS plates when subjected to forces and pressures • We learned about stretching in beams and plates • Dependence on the boundary conditions • The nonlinear displacements of MEMS beams and plates • We introduced the motivations and techniques for studying the dynamic response of MEMS devices • Today • Dynamic response of MEMS devices • Equivalence between mechanical and electrical dynamic response • Equivalent circuit modeling • Sinusoidal steady state response3 What information are we really interested in? F b • Frequency response or sinusoidal steady state response • Time domain response [Show More]
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